Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolati…
This book explores nanotechnology, a rapidly evolving and growing field with applications in a large number of areas. The concepts and physics are highlighted through topics such as nanoscience, quantum effects, nanostructures, and new forms of carbon. Applications and potential health and safety implications of nanomaterials are discussed for healthcare, food production, electronics, defence a…